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Synthetic Quartz
SK-1300 series

SK-1300
SK-1310
SK-1310

Characteristics
  • Our Company successfully developed synthetic fused silica SK-1300 as a result of significant improvements made by the conventional VAD (vapor-phase axial deposition) method of optical fiber manufacturing technology.

  • Unparalleled,ideal characteristics are achieved.
  • Ultra-high purity(total metallic impurities less than 0.5ppm)
  • The OH content can be controlled to 1ppm to less.
  • High heat resistance is ensured.
  • High transmission is achieved.(The SK-1310 has excellent characteristics over the entire wavelength range of ultraviolet,visible and infrared.)
  • Contain no bubbles or striae.
  • Excellent laser resistance properties.
  • The material for excelling in the homogeneity and precise optics is prepared.(SK-1320 series)
Application
  • For VLSI manufacturing process
  • Furnace tubes
  • various industrial jigs for semiconductors
  • Sputtering targets
  • Photomask substrates for ultra-LSI and LCD.
  • Wafers for various types of devices such as TFT(poly-Si thin-film transistor LCD.), SOI (Silicon on Insulator) etc.
  • Optical elements, Lenses, mirrors and windows, for ultraviolet and vacuum ultraviolet.
  • materials for optical fiber

Standard size
  • Tubes&Rods
    Outer diameters of large size tubes 100~450mm
    Outer diameters 5~100mm
  • Rods
    Outer diameters 3~200mm
  • Plates
    50~500mm round,50~1000mm sq.

Fused Silica
SK-4304 series
SK-4306 series

Features
  • "Well-selected natural crystal is fused by oxyhydrogen flame to manufacture high quartz"

  • SK-4306 is the high purity alkali goods.
Application For semiconductor industrial
For various jig- tools
For large-scale Rinse Vessel
sputtering targets
For physics and chemistry
Standard size
  • Tubes&Rods
    Outer diameters of large size tubes 100~450mm
    Outer diameters 5~100mm
  • Rods
    Outer diameters 3~200mm
  • Plates
    50~500mm round,50~1000mm sq.

Chosen for Their Shape

Quartz tube/Rod

More info

OHARA QUARTZ silica glass tubing and rod products range from synthetic fused silica for processing operations of ultra LSIs to fused silica for various types of jigs and tools.

OHARA QUARTZ synthetic fused silica,which offers an ultra-purity of tubing and rod without any bubbles contained.

Fused quartz uses a high-purity crystal thus providing both hydrous products that contain fewer bubbles and anhydrous products with a high heat resistance.


Synthetic Quartz Wafer The synthetic quartz substrate of the OHARA QUARTZ Co., Ltd. is a product that combines the characteristic with an excellent VAD method synthesis fused silica SK-1300, the precise processing of polishing technique is invented, and has the following kinds.
1.Photmasku substrate for ULSI &LCD
2.TFT Substrates
3.each sizes of quartz wafer

Microimpurity analysis values

Method Material OH
Content
Al Fe Ti Ca Mg Cu P B Na K Li
Synthetic
quartz
SK-1300
<200
<0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01
SK-1310 <1  <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01
Fused
quartz
SK-4304
150
9.0 0.3 1.5 0.6 0.06 <0.03 <0.08 <0.03 0.3 0.2 0.1
SK-4306 150 8.0 0.2 1.5 0.4 0.06 <0.03 <0.08 <0.03 0.1 <0.1 <0.1
Note ) Values shown in this chart are not standard (i.e.,guaranteed) values.
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