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Quartz Tube・Rod

tube.rodOHARA QUARTZ silica glass tubing and rod products range from synthetic fused silica for processing operations of ultra LSIs to fused silica for various types of jigs and tools.
OHARA QUARTZ synthetic fused silica, which offers an ultra-high purity of tubing and rod without any bubbles contained, is the result of a substantial upgrade of the earlier vapor-phase axial deposition method introduced to us by NTT.
OHARA QUARTZ fused quartz uses a high-purity crystal thus providing both hydrous products that contain fewer bubbles and anhydrous products with a high heat resistance.

Types of Products


Types of Products


Standard Sizes


  Outside diameter (mm) Wall thickness (mm) Length (m)
Large-diameter tube 100-450 4 2
Rod 10-50   1

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Typical Impurity Analysis

ppm

Element

Al

Fe Ca Cu Na K Li OH
SK-1300 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <200
SK-1310 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 <1
SK-4304 9 0.3 0.6 <0.03 0.3 0.3 <0.1 150
SK-4306 8 0.2 0.4 <0.03 0.1 <0.1 <0.1 150
SK-3030 15 0.3 0.6 <0.03 0.8 0.7 0.4 <30
SK-3036 9 0.2 0.4 <0.03 0.1 0.1 <0.1 <30

Viscosity


Viscosity


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Chemical Resistance


Chemicals Treatment temperatures (°C) & hours (H) Weight loss (mg/cm2)
5% HCℓ 25 100 0.01
5% H2SO4 25 100 0.01
10% NH4OH 20 100 0.015
10% NaOH 20 100 0.03


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